High-speed 1.5 μm self-aligned constricted mesa DFB lasers grownentirely by MOCVD |
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| Authors: | Hirayama Y Furuyama H Morinaga M Suzuki N Kushibe M Eguchi K Nakamura M |
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| Affiliation: | Toshiba Res. & Dev. Center, Kawasaki; |
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| Abstract: | Ultrahigh-speed 1.5 μm wavelength self-aligned constricted mesa GaInAsP-InP distributed-feedback lasers grown entirely by low-pressure metalorganic chemical-vapor deposition are discussed. A self-aligned process was applied to lower the stray InP junction capacitance to as low as 1.6 pF. A record bandwidth of 13 GHz in the 1.5 μm wavelength region was demonstrated |
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