| Observation on Surface and Cross Section of Thin Film Solar Cells Using Atomic Force Microscope |
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| 作者姓名： | FENGLiang-huan WULi-li CAIWei CAIYa-ping ZHENGJia-gui ZHANGJing-quan LIBing LIWei |
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| 作者单位： | CollegeofMater.Sci.andEng.,SichuanUniversity,Chengdu610064,CHN |
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| 基金项目： | 国家高技术研究发展计划(863计划) |
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| 摘 要： | Atomic force microscope (AFM) is able to produce thrce-dimensional digital data in both force-mode and heightmode and its applications are not limited to map the surfaces of conducting materials. It can use the force-mode to image the repulsive and attractive force patterns. The cross sections of polycrystalline CdS/CdTe and amorphous silicon heterojunction solar cells are observed with AFM. In case of short circuit, the microstructures of different layers in the samples are clearly displayed. When the cells are open circuit, the topographical images are altered, the potential outline due to the space charge in junction region is observed. Obviously, AFM can be employed to investigate experimentally built-in potential in junction of semiconductor devices, such as solar cells.
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| 关 键 词： | 薄膜太阳能电池 原子力显微镜 形态学 横断面 |
| 收稿时间： | 2004/10/25 |
Observation on Surface and Cross Section of Thin Film Solar Cells Using Atomic Force Microscope |
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| FENGLiang-huan WULi-li CAIWei CAIYa-ping ZHENGJia-gui ZHANGJing-quan LIBing LIWei.Observation on Surface and Cross Section of Thin Film Solar Cells Using Atomic Force Microscope[J].Semiconductor Photonics and Technology,2005,11(2):111-115. |
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| Authors: | FENG Liang-Huan WU Li-li CAI Wei CAI Ya-Ping ZHENG Jia-Gui ZHANG Jing-quan LI Bing LI Wei |
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| Abstract: | Atomic force microscope (AFM) is able to produce three-dimensional digital data in both force-mode and height-mode and its applications are not limited to map the surfaces of conducting materials. It can use the force-mode to image the repulsive and attractive force patterns. The cross sections of polycrystalline CdS/CdTe and amorphous silicon heterojunction solar cells are observed with AFM. In case of short circuit, the microstructures of different layers in the samples are clearly displayed. When the cells are open circuit, the topographical images are altered, the potential outline due to the space charge in junction region is observed. Obviously, AFM can be employed to investigate experimentally built-in potential in junction of semiconductor devices, such as solar cells. |
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| Keywords: | AFM Morphology Thin film solar cells |
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