| Design and Simulation of Silicon-based NiCrAu MEMS Torsion Micromirror with Tilted Back-electrode |
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| 引用本文： | LUOYuan ZHANGYi. Design and Simulation of Silicon-based NiCrAu MEMS Torsion Micromirror with Tilted Back-electrode[J]. 半导体光子学与技术, 2005, 11(1): 69-72 |
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| 作者姓名： | LUOYuan ZHANGYi |
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| 作者单位： | SchoolofOptoelectron.,ChongqingUniversityofPosts＆Telecom.,Chongqing400065,CHN |
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| 基金项目： | Scientific Research Foundation(2003-52) and Youth Foundation(A2003-06) from Chongqing University of Posts & Telecom. |
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| 摘 要： | Torsion micromirror is a key structure of optical devices in micro-electro-mechanical system (MEMS), such as MEMS optical switches, MEMS variable optical attenuator, MEMS scanning micromirror array and so on. A silicon-based NiCrAu MEMS torsion micromirror is theoretically analyzed. It is shown that in order to have 15~ rotation, the driven voltage should be about 20 V and the thickness of the supporting beam must be controlled in the range of submicron orders of magnitude. This very thin beam makes the structure more unstable and unreliable, and also makes the fabrication more complicated. Based on parallel backelectrode analysis and testing, a tilted back-electrode has been designed to replace the parallel back-electrode in order to decrease the driven voltage and difficulty of fabricating processing. By theoretical analysis and simulation, a conclusion can be drown that the thickness can be improved from submicron to micron by using tilted back-electrode when using the same driven voltage. Tilted back-electrode is very effective to improve the stability and reliability of the micromirror structure.
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| 关 键 词： | MEMS NiCrAu 显微镜 倾斜背面电极 |
| 收稿时间： | 2004-07-01 |
Design and Simulation of Silicon-based NiCrAu MEMS Torsion Micromirror with Tilted Back-electrode |
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| LUO Yuan,ZHANG Yi. Design and Simulation of Silicon-based NiCrAu MEMS Torsion Micromirror with Tilted Back-electrode[J]. Semiconductor Photonics and Technology, 2005, 11(1): 69-72 |
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| Authors: | LUO Yuan ZHANG Yi |
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| Abstract: | Torsion micromirror is a key structure of optical devices in micro-electro-mechanical system(MEMS), such as MEMS optical switches, MEMS variable optical attenuator, MEMS scanning micromirror array and so on. A silicon-based NiCrAu MEMS torsion micromirror is theoretically analyzed. It is shown that in order to have 15° rotation, the driven voltage should be about 20V and the thickness of the supporting beam must be controlled in the range of submicron orders of magnitude. This very thin beam makes the structure more unstable and unreliable, and also makes the fabrication more complicated. Based on parallel back-electrode analysis and testing, a tilted back-electrode has been designed to replace the parallel back-electrode in order to decrease the driven voltage and difficulty of fabricating processing. By theoretical analysis and simulation, a conclusion can be drown that the thickness can be improved from submicron to micron by using tilted back-electrode when using the same driven voltage. Tilted back-electrode is very effective to improve the stability and reliability of the micromirror structure. |
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| Keywords: | MEMS Torsion micromirror Tilted back-electrode |
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