多孔硅基微型 Bragg 光学传感器的理论和应用研究

对多孔硅基微型光学传感器的可制备性进行了理论分析，说明只要选择合适的腐蚀条件，采用交替改变电流密度的方法就可以得到折射率随深度交替变化的多层多孔硅结构，即 Bragg 反射镜，同时可实现了反射谱峰位可调。提出了Bragg 反射镜的理论模型，对其布拉格中心波长，半峰全宽以及光强反射率进行了理论计算，得出了高低折射率之比、层数与光强反射率之间的关系，并对实际情况进行了说明。最后，简单介绍了 Bragg 反射镜在气体/液体传感器及光学微腔中的应用，有一定的应用价值。

Theory and Application Research on the Porous Silicon Micro-optical Bragg Sensors

In this thesis, the producibility of porous silicon-based micro-optical sensors is analyzed in theory. This illustrates that the use of alternative methods to change the current density can be obtained refractive index variation with depth alternating multilayer porous silicon structures as long as the appropriate corrosion conditions could be chosen, namely, the peak position of Bragg mirror reflectance spectrum can be adjustable. In this thesis, a theoretical model of Bragg reflector is put forward, the Prague center wavelength, FWHM and intensity reflectivity are calculated in theory, the conclusion could be reached on the ratio of high and low refractive index and the relationship between layer and intensity reflectivity. Finally, a brief introduction of the Bragg reflector in the gas / liquid sensors and optical micro-cavity applications is proposed in this thesis. A number of potential applications are existed in it.