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The characterization of new VGMS (vacuum gauge metrology system) by the traceability of multi stage static expansion system |
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| Authors: | Ilknur Kocas Gokce Sevim Sariyerli |
| Affiliation: | Pressure and Vacuum Laboratories, National Metrology Institute UME, Kocaeli, Turkey |
| Abstract: | |
| Keywords: | Vacuum gauge metrology system Multi stage static expansion system Capacitance diaphragm manometer Spinning rotor gauge Uncertainty Instability |
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