| 全面垂直层流洁净室气流组织影响因素探讨 |
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| 引用本文： | 袁旭东,王科. 全面垂直层流洁净室气流组织影响因素探讨[J]. 制冷与空调(北京), 2005, 5(1): 12-16 |
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| 作者姓名： | 袁旭东 王科 |
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| 作者单位： | 华中科技大学建筑环境与设备实验室(袁旭东)，华中科技大学建筑环境与设备实验室(王科) |
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| 摘 要： | 全面垂直层流洁净室气流组织的三个参数(不均匀性NU、通风效率Ea、流线平行度)影响着芯片的成品率.本文从以下方面论述了洁净室的气流组织的影响因素:送风方式、洁净度不同的速度介面、洁净室内设备及操作人员、洁净室的地板和盲板、灯具、缝隙等,为以后的精确分析洁净室的洁净度和对洁净室的气流组织优化提供帮助.
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| 关 键 词： | 全面垂直层流洁净室 送风方式 速度介面 室内设备及操作人员 |
DISCUSSION OF FACTORS THAT EFFECT AIR PERFORMANCE OF UNIDIRECTIONAL - FLOW CLEANROOMS |
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| YUAN Xudong,WANG Ke. DISCUSSION OF FACTORS THAT EFFECT AIR PERFORMANCE OF UNIDIRECTIONAL - FLOW CLEANROOMS[J]. Refrigeration and Air-conditioning, 2005, 5(1): 12-16 |
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| Authors: | YUAN Xudong WANG Ke |
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| Abstract: | There are three parameters playing important role in the efficiency of CMOS chip production: Non-Uniformity,the air-change efficiency,air-flow parallelism.In order to research the deterministic simulation about unidirectional cleanroom,the factors that affect the air-flow performance of unidirectional cleanrooms such as the method of supply air ,the face velocity of different cleanliness level ,the devices and operators in the cleanrooms, floor,blank plate,lamps,aperture etc are discussed,which can help carry on exact analysis in the future. |
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| Keywords: | Unidirectional-flow Cleanrooms Modes of supply air Face velocity Devices and operators |
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