免形状测量机的误差分离技术研究

免形状(Form-free)测量机是基于零件"小偏差假设",不依赖被测对象的几何形状、无须知道几何参数、无须精密定位的情况下,也能进行几何尺寸和形状误差的测量与评定的测量机。针对此测量机,建立了误差补偿综合模型,为测量机误差测量和补偿提供了理论基础。提出基于激光追踪仪的几何误差分离方法,快速准确实现对测量机几何误差的检定。使用软件对分离算法进行仿真及实验,结果证明该分离算法是可行的,并将其与激光干涉仪测得的误差比较,两者非常吻合,证明此算法具有快速、精度高等优点,适用于坐标测量机的几何精度检测。

Method of Geometric Error Separation for Form-free Measurement Machine

Based on the ＂small deviation hypothesis＂ for precision parts, the Form -free measurement machine is a new one, where the measuring instrument can process the measurement for dimensions and form tolerances without knowing the geometrical form, parameters, and precision positioning. According to this machine, who＇ s name is Form - free 300, an error synthesis model is derived which provides a theory based for error measurement and compensation. A method of geometric error detection based on laser tracer is proposed to achieve rapid and repeatable error detections. By using a simulation software to simulate and experiment the separation algorithm. And comparing with the errors by a laser interferometer, the result is very closely. The simulation verify the feasibility and accuracy of the method, which is suitable for CMM in geometric precision detection.