| 气体压强对非晶InGaAs薄膜光学常数的影响 |
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| 引用本文： | 陈甫,位永平,么艳平,邓敏,曲博文,薄报学.气体压强对非晶InGaAs薄膜光学常数的影响[J].长春理工大学学报,2010,33(1):51-53,7. |
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| 作者姓名： | 陈甫 位永平 么艳平 邓敏 曲博文 薄报学 |
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| 作者单位： | 长春理工大学高功率半导体激光国家重点实验室,长春,130022;吉林师范大学信息技术学院,四平,136000 |
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| 摘 要： | 论述一种用透射谱包络线法计算非晶薄膜的折射率、消光系数和光学带隙的方法。通过正交实验确定除压强之外的工艺参数,研究压强的改变对薄膜主要光学常数的影响,运用最小二乘法、内插值法在matlab编程基础上,拟合出光学常数曲线,借由观察曲线的特点,分析在低工作气压下,气压的改变对光学常数的影响。
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| 关 键 词： | 光学常教 包络线法 折射率 消光系数 光学带隙 |
Effect of Working gas Pressure on the Optical Constants of a-InGaAs Films |
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| CHEN Fu,WEI Yongping,YAO Yanping,DENG Min,QU Bowen,BO Baoxue.Effect of Working gas Pressure on the Optical Constants of a-InGaAs Films[J].Journal of Changchun University of Science and Technology,2010,33(1):51-53,7. |
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| Authors: | CHEN Fu WEI Yongping YAO Yanping DENG Min QU Bowen BO Baoxue |
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| Affiliation: | 1.State Key Lab on High Power Semiconductor Lasers;Changchun University of Science and Technology;Changchun 130022;2.College of Information and Technology;Jilin Normal University;Siping 136000 |
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| Abstract: | This paper presents a method that calculates refractive index,extinction coefficient and optical band-gap of amorphous thin-film with transmission spectral envelope. The process parameters except the pressure are determined by orthogonal experiments,and the impact of main optical constants of thin films caused by the changes of the pressure is studied. Using the least square method and interpolation on basis of programming in matlab,a curve of optical constants is fitted,which is used to analyze the influen... |
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| Keywords: | optical constants envelope method refractive index extinction coefficient optical band-gap |
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