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| 基于SOI材料的兵器微电子技术应用分析 | |
| 引用本文： | 张新,高勇,王彩琳,邢昆山,安涛. 基于SOI材料的兵器微电子技术应用分析[J]. 兵器材料科学与工程, 2005, 28(3): 48-53 |
| 作者姓名： | 张新 高勇 王彩琳 邢昆山 安涛 |
| 作者单位： | 1. 西安理工大学,自动化学院,陕西,西安,710048;华东光电集成器件研究所,安徽,蚌埠,233042 2. 西安理工大学,自动化学院,陕西,西安,710048 3. 华东光电集成器件研究所,安徽,蚌埠,233042 |
| 摘 要： | 随着集成技术进入亚微米阶段,传统的硅基集成电路由于存在闩锁等不利因素,使其应用受到了限制。而基于SOI材料的微电子技术是能突破硅材料与硅集成电路限制的新技术,是国际半导体的前沿技术之一,是发展兵器装备用元器件的又一关键材料技术。介绍了SOI材料结构技术用于微电子器件的优势、SOI结构及基于SOI结构材料的兵器微电子技术应用,展望了SOI技术的发展前景。 |
| 关 键 词： | SOI材料技术 SOI结构 兵器微电子技术 |
| 文章编号： | 1004-244X(2005)03-0048-05 |
| 修稿时间： | 2004-09-14 |
Application research of micro - electron technology for ordnance equipment based on SOI material |
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| ZHANG Xin,GAO Yong,Wang Cai-Lin,XING Kun-shan,AN Tiao. Application research of micro - electron technology for ordnance equipment based on SOI material[J]. Ordnance Material Science and Engineering, 2005, 28(3): 48-53 | |
| Authors: | ZHANG Xin GAO Yong Wang Cai-Lin XING Kun-shan AN Tiao |
| Abstract: | In this paper, SOI technology for ordnance equipment is reported. With the silicon IC technology into sub - micro, the application of silicon IC in many areas is restricted, because of its unfavorable factors such as latch effect, etc. The micro - electronic technology based on SOI material is a new technology which breaks out the restrictions of silicon material and silicon IC, and a key technology used in ordnance equipment. In this paper, the superiorities of semiconductor device based on SOI, SOI structure, and micro - electron technology based on SOI material are introduced, and prospects for SOI technology are forecasted. |
| Keywords: | SOI material technology SOI structure technology of ordnance equipment |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |