| α-Fe_2O_3气敏元件可靠性工艺设计 |
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| 引用本文： | 金剑波 李本会. α-Fe_2O_3气敏元件可靠性工艺设计[J]. 传感器与微系统, 1998, 17(2): 19-20,23 |
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| 作者姓名： | 金剑波 李本会 |
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| 作者单位： | 东北传感技术研究所 |
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| 摘 要： | 利用可靠性设计技术，对α－Ｆｅ２Ｏ３气敏元件进行可靠性工艺设计。通过失效源的确立与分析，提高元件的成品率，实现气敏元件可靠性的增长。
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| 关 键 词： | 气敏元件 可靠性 设计技术 |
Reliability Technology Design of α -Fe 2O 3 Gas Sensor |
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| Jin Jianbo Li Benhui. Reliability Technology Design of α -Fe 2O 3 Gas Sensor[J]. Transducer and Microsystem Technology, 1998, 17(2): 19-20,23 |
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| Authors: | Jin Jianbo Li Benhui |
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| Abstract: | The reliability design technology is applied to α-Fe 2O 3 gas sensor.By establishing and analyzing its failure resources, and its finishing product ratio and reliability level are increased. |
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| Keywords: | Gas sensor Reliability Design technology |
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