Shape control of polymer reflow structures fabricated by nanoimprint lithography |
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Authors: | Helmut Schift Christian Spreu |
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Affiliation: | a Paul Scherrer Institut, Laboratory for Micro- and Nanotechnology, 5232 Villigen PSI, Switzerland b Korea Institute of Machinery and Materials, 171 Jang-dong, Yusung-ku, Daejeon 305-600, Republic of Korea |
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Abstract: | Nanoimprinted resist pre-forms were modified using thermal reflow. This post-processing of binary structures enabled us to generate lens-like 3-D structures with different shapes by time- and surface chemistry controlled spreading. The method was extended to feature dimensions down to 100 nm. Surfactant coated line nanostructures were found to be limited by a maximum aspect ratio for imprinted pre-forms. This powerful post-processing method can be used either directly as post-processing step in production or for the fabrication of 3-D stamp copies with the desired shapes. |
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Keywords: | Nanoimprint lithography Reflow Dewetting Contact angle Lenses Stamps |
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