Fabrication of metamaterials in the optical spectral range |
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Authors: | D. Garoli M. NataliG. Parisi T. Ongarello E. SovernigoM. Massari V. Giorgis G. Ruffato S. De ZuaniF. Romanato |
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Affiliation: | a LaNN - Laboratory for Nanofabrication of Nanodevices, Corso Stati Uniti 4, Padova, Italy b University of Padova, Department of Physics, Via Marzolo 8, Padova, Italy c CNR-ICIS - Corso Stati Uniti 4, Padova, Italy d IOM-INFM, Area Science Park, Basovizza Trieste, Italy |
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Abstract: | Recently, the fabrication and optimization of nano-hole arrays in multi-layers has attracted much attention for their interesting applications in nano-optics and biosensing. In particular nano-hole arrays in metal-dielectric-metal stacks, also known as “fish-net” type structures, actually are the best candidates to accomplish some suggestive physical phenomena like negative refractive index, super-lensing and invisibility cloaks in the optical spectral range. Here, we report our preliminary results on the nanofabrication of “fish-net” type Au/dielectric/Au metamaterial stacks. Nano-hole arrays have been realized on Au (30 nm)-dielectric (50 nm)-Au (30 nm)/ITO stacks by means of direct ion milling with FIB using a FEI Nova 600i instrument. Finite element method (FEM) simulations were used to design the structures and to foresee their optical behavior. |
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Keywords: | FIB Metamaterials Fish-net Negative refractive index |
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