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Patterning of pyramidal recesses in (1 0 0)InP substrate |
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| Authors: | P Eliáš I Kosti?J Šoltýs |
| Affiliation: | a Institute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská cesta 9, 841 04 Bratislava, Slovak Republic b Institute of Informatics, Slovak Academy of Sciences, Dúbravská cesta 9, 845 07 Bratislava, Slovak Republic |
| Abstract: | |
| Keywords: | Inverted pyramids InP Wet-etching |
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