| 扫描电子显微镜低真空模式的应用 |
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| 引用本文： | 许亚娟,陈剑峰,项彬,宋子濂.扫描电子显微镜低真空模式的应用[J].理化检验(物理分册),2011(12):786-789. |
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| 作者姓名： | 许亚娟 陈剑峰 项彬 宋子濂 |
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| 作者单位： | [1]中国铁道科学研究院金属及化学研究所,北京100081 [2]FEI公司（上海）,上海201203 |
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| 摘 要： | 低真空模式是扫描电镜的一种新型观测模式,它的最大特点是可以对不导电样品直接进行观察。这样既避免了不导电样品表面由于电荷累积产生的假象,又省去了对样品表面进行导电喷镀,还有利于不导电样品其他信息的检测与分析。此外,扫描电镜低真空模式还可以对低致密度或多孔样品进行直接观察,这是高真空模式无法取代的。
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| 关 键 词： | 扫描电镜 低真空模式 应用 不导电样品 多孔样品 |
Application of the Low Vacuum Mode for SEM |
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| XU Ya-juan,CHEN Jian-feng,XIANG Bin,SONG Zi-lian.Application of the Low Vacuum Mode for SEM[J].Physical Testing and Chemical Analysis Part A:Physical Testing,2011(12):786-789. |
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| Authors: | XU Ya-juan CHEN Jian-feng XIANG Bin SONG Zi-lian |
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| Affiliation: | 1(1.Metals and Chemistry Research Institute,China Academy of Railway Science,Beijing 100081,China; 2.FEI Company(Shanghai),Shanghai 201203,China) |
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| Abstract: | Low vacuum mode is a late-model kind of observing pattern for SEM.Its biggest characteristic is direct observation of non-conductive samples.In such a way,either the pseudo image caused by electric charge accumulation on the surface of non-conductive samples was avoided or the conductive coating on the surface of the samples was saved.Moreover,it facilitates testing and analysis of other information of the non-conductive sample.In addition,low vacuum mode is carried out on the samples that are not tight for direct observation,which is no substitute for high vacuum. |
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| Keywords: | SEMi low vacuum mode application non-conducting sample porous sample |
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