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Fabrication of optical elements with better than λ/1000 thickness uniformity by thin-film deposition through a multi-aperture mask |
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| Authors: | J.W. Arkwright |
| Affiliation: | CSIRO Industrial Physics, PO Box 218, Lindfield, NSW 2070, Australia |
| Abstract: | |
| Keywords: | Deposition process Optical coatings Physical vapour deposition (PVD) Optical surface correction |
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