Nanoindentation-induced deformation behaviour of diamond-like carbon coatings on silicon substrates |
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Authors: | Ayesha J. Haq P.R. Munroe P.J. Martin |
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Affiliation: | a School of Materials Sci. and Eng., University of New South Wales, Sydney, NSW 2052, Australia b CSIRO Industrial Physics, PO Box 218, Lindfield, NSW 2070, Australia |
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Abstract: | The deformation behaviour of diamond-like carbon (DLC) coatings on silicon substrates induced by indentation has been investigated. DLC coatings, deposited by a plasma-assisted chemical vapour deposition technique, were subjected to nanoindentation over a range of maximum loads from 100 mN to 300 mN. The resulting load-displacement plots displayed pop-ins for maximum loads of 200 mN and above, with no distinct pop-out for any of the loads studied. Compressive deformation of the coating, up to a strain of ∼ 9%, was observed. The coating-substrate composite was devoid of cracks at lower loads, but at the maximum load of 300 mN, ring cracks in the coating and a median crack in the substrate were observed. Furthermore, cracking, {111} slip and localized phase transformations were observed in the silicon substrate. The onset of these structural changes was correlated to the mechanical behaviour during indentation. |
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Keywords: | Diamond-like carbon Nanoindentation Deformation Focussed ion beam microscopy |
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