| CO2激光熔融毛细管端面制备的光纤F-P压力传感器 |
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| 引用本文： | 张皓月,李红,孟凡勇,徐滔,祝连庆.CO2激光熔融毛细管端面制备的光纤F-P压力传感器[J].半导体光电,2021,42(1):35-39. |
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| 作者姓名： | 张皓月 李红 孟凡勇 徐滔 祝连庆 |
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| 作者单位： | 北京信息科技大学光电测试技术及仪器教育部重点实验室,北京100192;北京信息科技大学光纤传感与系统北京实验室,北京100192;北京信息科技大学光纤传感与系统北京实验室,北京100192;北京信息科技大学北京市光电测试技术重点实验室,北京100192 |
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| 基金项目： | 国家自然科学基金项目(61903042,51535002)；高等学校学科创新引智计划项目(D17021)；北京市自然科学基金项目(4194077).通信作者:祝连庆E-mail:lqzhu_bistu@sina.com |
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| 摘 要： | 提出了一种利用CO2激光熔融毛细管端面来制备光纤法布里-珀罗(F-P)压力传感器的方法。F-P结构由普通单模光纤和基于CO2激光熔融毛细管端面制备的硅薄膜组成。文章详细说明了硅薄膜的制造工艺和熔融参数,并对光纤F-P压力传感器进行了性能测试。实验结果表明:制备的光纤F-P压力传感器对气压具有良好的灵敏度和线性度,灵敏度可达到16.37pm/kPa,线性度为0.998。该光纤F-P压力传感器结构紧凑,易于生产,具有在极端恶劣环境下的应用潜力。
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| 关 键 词： | 光纤F-P CO2激光 毛细管端面 硅薄膜 压力传感器 |
| 收稿时间： | 2020/11/23 0:00:00 |
Study on Fabrication of Fiber F-P Pressure Sensor by CO2 Laser Melting Capillary End Face |
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| ZHANG Haoyue,LI Hong,MENG Fanyong,XU Tao,ZHU Lianqing.Study on Fabrication of Fiber F-P Pressure Sensor by CO2 Laser Melting Capillary End Face[J].Semiconductor Optoelectronics,2021,42(1):35-39. |
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| Authors: | ZHANG Haoyue LI Hong MENG Fanyong XU Tao ZHU Lianqing |
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| Affiliation: | Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument;Beijing Laboratory of Optical Fiber Sensing and System;Beijing Laboratory of Optical Fiber Sensing and System;Beijing Key Laboratory of Optoelectronic Measurement Technology, Beijing Information Science & Technology University, Beijing 100192, CHN |
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| Abstract: | A method for fabricating optical fiber Fabry-Perot (FP) pressure sensor by using CO2 laser to melt capillary end face is proposed. The F-P structure is composed of ordinary single-mode fiber (SMF) and a silicon film prepared based on the end face of a CO2 laser fusion capillary. In this paper, the manufacturing process and melting parameters of the silicon thin film are introduced in detail and performance tests are performed on the F-P pressure sensor. The results show that the fabricated fiber F-P sensor realizes good sensitivity and linearity to the pressure, obtaining a sensitivity of 16.37pm/kPa, and the linearity of 0.998. |
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| Keywords: | fiber Fabry-Perot CO2 laser capillary end silicon film pressure sensor |
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