| Magnetic field enhanced radio frequency ion source and its application for Si-incorporation diamond-like carbon film preparation |
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| 作者姓名： | 殷冀平 王庆 吴鑫龙 程春玉 巴德纯 蔺增 |
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| 作者单位： | School of Mechanical Engineering&Automation;Key Laboratory of Implant Device and Interface Science of Liaoning Province |
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| 基金项目： | This work was supported by National Natural Science Foundation
of China (No. 51775096); Fundamental Research Funds
for the Central Universities, China (No. N141008001/2); and
the grants (Y17-0-003 and F16-080-8-00) from Shenyang city. |
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| 摘 要： | Various ion sources are key components to prepare functional coatings,such as diamond-like carbon(DLC)films.In this article,we present our trying of surface modification on basis of Si-incorporation diamond-like carbon(Si-DLC)produced by a magnetic field enhanced radio frequency ion source,which is established to get high density plasma with the help of magnetic field.Under proper deposition process,a contact angle of 111°hydrophobic surface was achieved without any surface patterning,where nanostructure SiC grains appeared within the amorphous microstructure.The surface property was influenced by ion flow parameters as well as the resultant surface microstructure.The magnetic field enhanced radio frequency ion source developed in this paper was useful for protective film applications.
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| 关 键 词： | magnetic field enhanced radio frequency ion source Si-incorporation diamond-like carbon film MICROSTRUCTURE HYDROPHOBICITY protective film |
| 收稿时间： | 2019-07-30 |
| 修稿时间： | 2019-10-18 |
Magnetic field enhanced radio frequency ion source and its application for Siincorporation diamond-like carbon film preparation |
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| Jiping YIN,Qing WANG,Xinlong WU,Chunyu CHENG,Dechun BA,Zeng LIN.Magnetic field enhanced radio frequency ion source and its application for Si-incorporation diamond-like carbon film preparation[J].Plasma Science & Technology,2020,22(2):25502-86. |
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| Authors: | Jiping YIN Qing WANG Xinlong WU Chunyu CHENG Dechun BA Zeng LIN |
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| Abstract: | Various ion sources are key components to prepare functional coatings, such as diamond-like
carbon (DLC) films. In this article, we present our trying of surface modification on basis of Siincorporation
diamond-like carbon (Si-DLC) produced by a magnetic field enhanced radio
frequency ion source, which is established to get high density plasma with the help of magnetic
field. Under proper deposition process, a contact angle of 111° hydrophobic surface was
achieved without any surface patterning, where nanostructure SiC grains appeared within the
amorphous microstructure. The surface property was influenced by ion flow parameters as well
as the resultant surface microstructure. The magnetic field enhanced radio frequency ion source
developed in this paper was useful for protective film applications. |
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| Keywords: | magnetic field enhanced radio frequency ion source Si-incorporation diamond-like carbon film microstructure hydrophobicity protective film |
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