| 微型复合溅射离子泵的设计研究 |
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| 引用本文： | 胡银富,齐京,陈旭. 微型复合溅射离子泵的设计研究[J]. 真空科学与技术学报, 2007, 27(1): 20-24 |
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| 作者姓名： | 胡银富 齐京 陈旭 |
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| 作者单位： | 清华大学电子工程系,北京,100084 |
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| 摘 要： | 本文介绍了一种非蒸散型吸气剂（NEG）与微型溅射离子泵（SIP）集成构成的微型复合溅射离子泵。测试结果表明，当吸气剂激活后，复合泵的抽速达到0．45L／8，比未加吸气剂的同型溅射离子泵抽速提高了28％。该复合泵使真空器件的真空维持效果良好，可广泛应用于中小型的密闭真空器件中。
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| 关 键 词： | 真空器件 溅射离子泵 非蒸散型吸气剂 |
| 文章编号： | 1672-7126（2007）01-020-05 |
| 修稿时间： | 2006-05-12 |
Newly-Developed Miniaturized Compound Sputtering Ion Pump |
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| Hu Yinfu,Qi Jing,Chen Xu. Newly-Developed Miniaturized Compound Sputtering Ion Pump[J]. JOurnal of Vacuum Science and Technology, 2007, 27(1): 20-24 |
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| Authors: | Hu Yinfu Qi Jing Chen Xu |
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| Affiliation: | Dept. of Electronic Engineering, Tsinghua University, Beijing 100084, China |
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| Abstract: | A novel type of miniaturized compound sputtering-ion-pump(SIP) has been successfully developed and manufactured,in which the non-evaporation getter(NEG),wrapped up with stainless steel mesh,is installed in the narrow space between the iner wall of the pump cavity and the electrodes.And the enclosed magnets were designed,which can be removed during pump baking to activate the NEG.After the NEG is activated,its pumping speed is evaluated to be 0.45 L/s,28% higher than the conventional SIP without NEG.Its design details and its possible applications were also discussed. |
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| Keywords: | Vacuum device Sputtering ion pump NEG |
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