A hybrid humidity sensor using optical waveguides on a quartz crystal microbalance |
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| Authors: | Kazunari Shinbo Shunya Otuki Yuichi Kanbayashi Yasuo Ohdaira Akira Baba Keizo Kato Futao Kaneko Nobuo Miyadera |
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| Affiliation: | aGraduate School of Science and Technology, Niigata University, 2-8050 Ikarashi, Nishi-ku, Niigata City, Niigata 950-2181, Japan;bCenter for Transdisciplinary Research, Niigata University, 2-8050 Ikarashi, Nishi-ku, Niigata City, Niigata 950-2181, Japan;cHitachi Chemical Co., Ltd., 48 Wadai, Tsukuba City, Ibaraki 300-4247, Japan |
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| Abstract: | In this study, slab and ridge optical waveguides (OWGs) made of fluorinated polyimides were deposited on a quartz crystal microbalance (QCM), and hybrid sensors using OWG spectroscopy and the QCM technique were prepared. Polyvinyl alcohol (PVA) film with CoCl2 was deposited on the OWGs, and the characteristics of humidity sensing were investigated. A prism coupler was used to enter a He–Ne laser beam (λ = 632.8 nm) to the slab OWG. The output light intensity markedly changed due to chromism of the CoCl2 as a result of humidity sorption, and this change was dependent on the incident angle of the laser beam to the slab OWG. During the measurement of output light, the QCM frequency was simultaneously monitored. The humidity dependence of the sensor with the slab OWG was also investigated in the range from 15 to 85%. For the sensor with the ridge OWG, white light was entered by butt-coupling, and the characteristics of humidity sensing were investigated by observing the output light spectrum and the QCM frequency. |
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| Keywords: | Optical waveguide spectroscopy Quartz crystal microbalance Hybrid sensor Cobalt (II) chloride Chromism |
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