Examples of image processing using a computer controlled SEM |
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Authors: | Bruce E. Artz |
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Abstract: | Several examples of the use of digital image processing on SEM images are presented. The emphasis is on image enhancement as opposed to pattern recognition. Examples given include non-linear histogram modification, noise filtering, and frame by frame subtraction. Image processing is done on digitally stored images obtained from a modified SEM. The SEM has been modified to allow minicomputer control of the electron/CRT beam position and blanking. Digitization of the sample signals, such as secondary electron, backscattered electron, and absorbed current is done using a 5 MHz voltage to frequency converter and a 100 KHz timer/sealer combination. Software for image storage and manipulation is also described. |
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