A Crystalline Si3N4/Amorphous Si3N4 Composite

A composite consisting of elongated α-Si₃N₄ crystallites (5–50 (Am in diameter) embedded in an amorphous Si₃N₄ matrix was synthesized by chemical vapor deposition. The hardness and indentation fracture toughness of the amorphous matrix and of the composite have been evaluated at temperatures from ambient to 1200°C. It was found that the crystallites have relatively little influence on the hardness and indentation fracture toughness when the surrounding matrix is amorphous. However, a 1400°C heat treatment of the material results in a matrix consisting of small crystals (100 nm in diameter) surrounded by carbon-containing regions which appear to be amorphous in the TEM; TEM and EELS in nearby triple points revealed the presence of amorphous carbon. After heat treatment, the indentation fracture toughness at ambient and at 1200°C is increased due to extensive microcracking. The Vickers hardness at 1200°C also increased significantly as a result of the heat treatment. The relationship between the mechanical properties and the microstructure is discussed.