| 非制冷红外焦平面阵列进展 |
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| 引用本文： | 何伟,焦斌斌,薛惠琼,欧毅,陈大鹏,叶甜春.非制冷红外焦平面阵列进展[J].电子工业专用设备,2008,37(5):18-24. |
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| 作者姓名： | 何伟 焦斌斌 薛惠琼 欧毅 陈大鹏 叶甜春 |
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| 作者单位： | 中科院微电子研究所硅器件与集成技术研究室,北京,100029 |
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| 摘 要： | 非制冷红外成像技术已广泛应用于军事和民用领域,一直是人们关注的焦点之一,其核心部件是非制冷红外焦平面阵列(IRFPA:Infrared Focal Plane Array)。综述了几种具有代表性的非制冷IRFPA的探测原理、发展历史和现状。它们是:热敏电阻型、热释电型、热电堆型、二极管型、热-电容型非制冷IRFPA和应用光力学效应的非制冷IRFPA、基于法布里-珀罗微腔阵列的非制冷IRFPA。
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| 关 键 词： | 投非制冷红外成像技术 非制冷红外焦平面阵列 热敏电阻 热释电 热电堆 热-电容 光力学 法布里-珀罗微腔阵列 |
| 文章编号： | 1004-4507(2008)05-0018-06 |
| 修稿时间： | 2008年3月26日 |
Development of Uncooled IRFPA |
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| HE Wei,JIAO Bin-bin,XUE Hui-qiong,OU Yi,CHEN Da-peng,YE Tian-chun.Development of Uncooled IRFPA[J].Equipment for Electronic Products Marufacturing,2008,37(5):18-24. |
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| Authors: | HE Wei JIAO Bin-bin XUE Hui-qiong OU Yi CHEN Da-peng YE Tian-chun |
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| Abstract: | Uncooled infrared imaging technology has been applied widely in both military and civil fields, and is always one of the focuses concerned by people. The key component of it is uncooled infrared focal plane array (IRFPA). In the paper, the detective principle, evolution history and current state of several representative uncooled IRFPA are summarized. They are thermistor mode, pyroelectric mode, thermopile mode, diode mode, thermo-capacitor mode IRFPA and optomechanical uncooled IRFPA, uncooled IRFPA based on Fabry-Perot micro-cavity array. |
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| Keywords: | Uncooled infrared imaging technology Uncooled infrared focal plane array Thermistor Pyroelectric Thermopile Thermo-capacitor Optomechanical Fabry-Perot micro-cavity array |
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