| 电子隧道传感器的原理、现状与发展 |
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| 引用本文： | 龙志峰 薛实福. 电子隧道传感器的原理、现状与发展[J]. 光学精密工程, 1998, 6(2): 1-6 |
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| 作者姓名： | 龙志峰 薛实福 |
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| 作者单位： | 清华大学精密仪器与机械学系 |
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| 摘 要： | 电子隧道传感器应用电子隧道原理对位移进行检测,结构简单,能耗低,它具有很高的灵敏度,并且不受尺寸限制,在微型化和集成化方面显示了良好的前景,各国科学家对电子隧道传感器进行了广泛的研究并制成了加速度计,红外探测器,磁强计,触觉传感器,这些传感器小巧且性能优异。本文介绍了电子隧道原理,对电子隧道传感器的结构和性能进行了描述,并讨论了电子隧道传感器的发展前景。
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| 关 键 词： | 隧道 加速度计 红外探测器 磁强计 触觉传感器 |
| 收稿时间： | 1997-07-21 |
| 修稿时间： | 1997-10-21 |
Electron Tunnel Sensor Principles,Present Situation and Prospect |
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| LONG Zhi Feng,XUE Shi Fu,LI Qing Xiang. Electron Tunnel Sensor Principles,Present Situation and Prospect[J]. Optics and Precision Engineering, 1998, 6(2): 1-6 |
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| Authors: | LONG Zhi Feng XUE Shi Fu LI Qing Xiang |
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| Affiliation: | Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084 |
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| Abstract: | A new class sensors based on electron tunneling effect are used to detect position.The device has a compact mechanical structure and novel sensitivity that will not decreases with the scales,and can be easily operated.Accelerometers,infrared detectors,magnetometers,and tactile sensors have been designed,built and tested.These sensors provide extremely high sensitivity,high bandwidth and wide dynamic range,and allowed miniaturization and integration.This paper has described the electron tunneling sensors performance and discussed their future development. |
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| Keywords: | Tunnel Accelerometer Infrared detector Magnetometer Tactile sensor |
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