Development of a 1 MV field-emission transmission electron microscope |
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| Authors: | Kawasaki T Matsui I Yoshida T Katsuta T Hayashi S Onai T Furutsu T Myochin K Numata M Mogaki H Gorai M Akashi T Kamimura O Matsuda T Osakabe N Tonomura A Kitazawa K |
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| Affiliation: | Advanced Research Laboratory, Hitachi, Ltd, Hatoyama, Saitama, Japan. tkawa@harl.hitachi.co.jp |
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| Abstract: | We developed a 1 MV field-emission transmission electron microscope. This paper reports details and specifications of the instrument. The microscope was designed to obtain a bright and coherent electron beam by using the field emission gun equipped with a pre-accelerating magnetic lens and the high-voltage power supply with high stability (0.5 ppm min(-1)). Using this microscope, the brightness of 1.8 x 10(10) A cm(-2) sr(-1) and the lattice resolution of 49.8 pm were attained. |
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