Refractive index tailoring in congruent Lithium Niobate by ion implantation |
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Authors: | S Sugliani M Bianconi M Chiarini GB Montanari A Menin L Potì |
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Affiliation: | a Consiglio Nazionale delle Ricerche, Istituto per la Microelettronica e i Microsistemi (CNR-IMM) and Laboratory MISTER, Via P. Gobetti 101, I-40129 Bologna, Italy b Carlo Gavazzi Space S.p.A. - Sede di Bologna and Laboratory MISTER, Via P. Gobetti 101, I-40129 Bologna, Italy c Università di Bologna - Dipartimento DEIS, Viale del Risorgimento 2, I-40136 Bologna, Italy d Scuola Superiore Sant’ Anna, Via Moruzzi 1, 56124 Pisa, Italy e CNIT - Photonic Networks Nat’l Lab, Via Moruzzi 1, 56124 Pisa, Italy |
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Abstract: | Refractive index profiles of ion-implanted Lithium Niobate waveguides are investigated. Z+ and z− congruent Lithium Niobate samples have been implanted with C3+ ions at a fluence of 4 × 1014 ions/cm2. Dark m-lines measurements have been performed on ordinary (no) and extraordinary (ne) indexes for three different wavelengths (532 nm, 632.8 nm, 818 nm) before and after the annealing process. A reconstruction of refractive index profiles by Reflectivity Calculation Method (RCM) is presented and commented. The literature data for nuclear damage regime have been collected and critically examined. no and ne curves as function of the density of energy released in nuclear collisions, Ed, describing the effects of ion implantation on LN refractive indexes has been obtained on the basis of literature data. no depth profile, predicted according to no(Ed) curve, is in good agreement with the RCM reconstructed one. In the case of ne, a satisfactory agreement has been reached only slightly modifying the ne(Ed) curve and considering an alternative RCM profile structure. |
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Keywords: | Lithium niobate Refractive index engineering Ion implantation Dark m-line spectroscopy Reflectivity calculation method |
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