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High definition surface micromachining of LiNbO3 by ion implantation |
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| Authors: | M. Chiarini G.G. Bentini P. De Nicola |
| Affiliation: | a Carlo Gavazzi Space SpA, Sede di Bologna and Laboratory MIST E.R., Via P. Gobetti 101, I-40129 Bologna, Italy b Consiglio Nazionale delle Ricerche - Istituto per la Microelettronica e i Microsistemi (CNR-IMM) and Laboratory MIST E.R., Via P. Gobetti 101, I-40129 Bologna, Italy |
| Abstract: | |
| Keywords: | High Energy Ion Implantation Micromachining Lithium Niobate MEOS |
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