多级低压电渗流微泵的设计、加工及测试

设计了一种多级低压电渗流微泵。该微泵系统主要由直流电源和蚀刻微通道的芯片等部分组成。芯片是在一块硅基片上蚀刻6组尺寸不同的微通道，从而达到提供不同大小的流量和承受不同背压的目的。对芯片的加工工艺流程进行了说明，同时对微泵进行了试验研究。实验结果表明：在低压下，该泵能够驱动通道中的液体。

Design, Manufacture and Test of A Low - voltage Multilevel Electroosmotic Mircropump

It designs a low - voltage multilevel electroosmotic mircropump, which is consist of DC power, a chip with etched microchannels, and other components. Etched six different size groups of microchannels on a silicon chip, the EOPs can provide different flow rates and achieve different pressure capacities. It illustrates the micro machining process, and describes the experiment to investigate the performance of micropump. The result of experimentation shows that the liquid can be driven bv the huron.