| 阵列场发射电子源的新进展 |
| |
| 引用本文： | 刘光治,夏蓉红,朱敏慧,刘武.阵列场发射电子源的新进展[J].电子与信息学报,2001,23(5):497-502. |
| |
| 作者姓名： | 刘光治 夏蓉红 朱敏慧 刘武 |
| |
| 作者单位： | 1. 中国科学院电子学研究所传感技术国家重点实验室北京,100080
2. 华中师范大学物理系,武昌,430070 |
| |
| 基金项目： | 国家自然科学基金(No.68971029,No.69971011)，国家863-512资助项目 |
| |
| 摘 要： | 阵列场发射阴极与真空微电子学是当前国际电子学领域的研究热点之一 ，发展迅速，某些先进电子物理装置的真空不加热电子源也有相应发展。根据这一趋势，按真空电子发射学科的特点，抓住其中研究与报道相对集中的阴极类型，进行了扼要的总结、归纳与评价；对近年来信息显示学科领域内已发展为实用的阵列等离子体电子源也进行了简单的介绍。
|
| 关 键 词： | 阵列场发射阴极 规则阵列场发射体 随机阵列场发射体 电子源 微电子 |
| 收稿时间： | 1999-7-20 |
| 修稿时间： | 1999年7月20日 |
NEW DEVELOPMENT OF FIELD EMISSION ARRAY |
| |
| Liu Guangyi,Xia Shanhong,Zhu Minhui,Liu Wu.NEW DEVELOPMENT OF FIELD EMISSION ARRAY[J].Journal of Electronics & Information Technology,2001,23(5):497-502. |
| |
| Authors: | Liu Guangyi Xia Shanhong Zhu Minhui Liu Wu |
| |
| Affiliation: | State Key Lab. of Transducer Tech Inst. of Electron., CAS Beijing 100080 China;Department of Physics Huazhong Normal University Wuhan 430070 China |
| |
| Abstract: | Some hot-spots of research in the field of the field emission array (FEA) and the vacuum microelectronics (VME) have been developed abroad in the last phase of 1990s. The expand speed of the FEA subject is very fast, and the non-heated electron emission sources iriside some advanced electron-physics equipments have also got a relevant development during this period. Considering those trends in the fields of basie science-FEA and VME abroad, according to the particularity of the vacuum electron emission, to seize the centralized relatively cathodes in the research or the report, a brief summary, review or comparison has been made, a more important type of the field emission array-the plasma electron source array which has already been developed into practical use recently in the information display has also been introduced simply. |
| |
| Keywords: | Field emission array (FEA) Regular FEA Random FEA Plasma electron source array |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
| 点击此处可从《电子与信息学报》浏览原始摘要信息 |
|
点击此处可从《电子与信息学报》下载全文 |
