| 石英玻璃管外表面抗腐蚀纳米金刚石薄膜的制备 |
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| 引用本文： | 张磊,马志斌,吴利峰. 石英玻璃管外表面抗腐蚀纳米金刚石薄膜的制备[J]. 金刚石与磨料磨具工程, 2009, 0(1): 23-26 |
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| 作者姓名： | 张磊 马志斌 吴利峰 |
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| 作者单位： | 湖北省等离子体化学与新材料重点实验室,武汉工程大学,湖北,武汉,430073;湖北省等离子体化学与新材料重点实验室,武汉工程大学,湖北,武汉,430073;湖北省等离子体化学与新材料重点实验室,武汉工程大学,湖北,武汉,430073 |
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| 基金项目： | 国家自然科学基金，湖北省高等学校优秀中青年科技创新团队计划 |
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| 摘 要： | 在具有新型谐振腔的微波等离子体CVD装置上,利用乙醇和氢气为工作气体在石英玻璃管外表面沉积了均匀、致密的纳米金刚石薄膜。采用扫描电子显微镜、Raman光谱及X射线衍射表征了金刚石薄膜的质量;设计腐蚀实验检验了金刚石薄膜的抗腐蚀效果。结果表明:在反应气压为5.5 kPa、碳源浓度为8vol%、石英玻璃管温度为500℃的条件下,得到的纳米金刚石薄膜能有效增强石英玻璃管的抗腐蚀性能。
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| 关 键 词： | 石英玻璃管 微波等离子体CVD 金刚石膜 抗腐蚀 |
Deposition of anti-corrosion nanocrystalline diamond film on quartz tube |
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| Zhang Lei,Ma Zhibin,Wu Lifeng. Deposition of anti-corrosion nanocrystalline diamond film on quartz tube[J]. Diamond & Abrasives Engineering, 2009, 0(1): 23-26 |
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| Authors: | Zhang Lei Ma Zhibin Wu Lifeng |
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| Affiliation: | Key Lab.of Plasma Chemistry& Advanced Materials in Hubei Province;Wuhan Institute of Technology;Wuhan 430073;China |
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| Abstract: | Uniform and compact nanocrystalline diamond thin films were deposited on quartz tube substrate with the gas mixture of ethanol and hydrogen by microwave plasma CVD equipment which has a novel type of resonance cavity.The quality of diamond thin films were tested by SEM,Raman spectroscopy and XRD.A corrosion experiment was designed to test the anti-corrosion effect of diamond thin films.The results showed that when the reaction pressure is 5.5 kPa,the ethanol concentration is 8 vo1%,the reaction temperature ... |
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| Keywords: | quartz tube microwave plasma CVD diamond thin film anti-corrosion |
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