Micromilling of metal alloys with focused ion beam–fabricated tools |
| |
Authors: | David P Adams Michael J Vasile Gilbert Benavides Ann N Campbell |
| |
Affiliation: | a Sandia National Laboratories, Albuquerque, NM 87185, USA;b Institute for Micromanufacturing, Louisiana Tech University, Ruston, LA 71272, USA |
| |
Abstract: | This work combines focused ion beam sputtering and ultra-precision machining as a first step in fabricating metal alloy microcomponents. Micro-end mills having 25 μm diameters are made by sputtering cobalt M42 high-speed steel and C2 micrograin tungsten carbide tool blanks. A 20 keV focused gallium ion beam is used to define a number of cutting edges and tool end clearance. Cutting edge radii of curvature are less than or equal to 0.1 μm. Micro-end mill tools having 2, 4 and 5 cutting edges successfully machine millimeter long trenches in 6061-T4 aluminum, brass, 4340 steel and polymethyl methacrylate. Machined trench widths are approximately equal to the tool diameters, and surface roughnesses (Ra) at the bottom of micromachined features are 200 nm. Microtools are robust and operate for more than 6 h without fracture. Results from ultra-precision machining aluminum alloy at feed rates as high as 50 mm/minute and an axial depth of 1.0 μm are included. |
| |
Keywords: | Micromilling Microtools Ultra-precision machining |
本文献已被 ScienceDirect 等数据库收录! |
|