| 基于超薄钽酸锂晶体材料高响应太赫兹探测器 |
| |
| 引用本文： | 梁志清,刘子骥,蒋亚东,郑兴,王涛,于贺.基于超薄钽酸锂晶体材料高响应太赫兹探测器[J].红外与毫米波学报,2016,35(5):520-525. |
| |
| 作者姓名： | 梁志清 刘子骥 蒋亚东 郑兴 王涛 于贺 |
| |
| 作者单位： | 电子科技大学光电信息学院,电子科技大学光电信息学院,电子科技大学光电信息学院,电子科技大学光电信息学院,电子科技大学光电信息学院,电子科技大学光电信息学院 |
| |
| 基金项目： | 国家自然科学基金项目（面上项目，重点项目，重大项目）;中国博士后科学基金;创新研究群体科学基金 |
| |
| 摘 要： | 太赫兹(Thz)探测器工作在室温条件下极大地促进了太赫兹科学与技术的应用。超薄(10μm)钽酸锂(LiTaO3)晶片被用作太赫兹探测器敏感元材料。基于钽酸锂晶片太赫兹探测器在2.52 THz激光辐射源照射下, 20Hz斩波频率时响应率可达到8.38×104V/W, 等效噪声功率NEP)可达到1.26×10-10W。这种加工超薄钽酸锂晶片的方法为制备高响应率太赫兹探测器提供了一个可行的方法。
|
| 关 键 词： | 太赫兹探测器 钽酸锂晶片 化学研磨及机械抛光 电压响应率 噪声等效功率 |
| 收稿时间： | 1/6/2016 12:00:00 AM |
| 修稿时间： | 4/8/2016 12:00:00 AM |
High responsivity of terahertz detector based on ultra-thin LiTaO3 crystal material |
| |
| LIANG Zhi-Qing,LIU Zi-Ji,JIANG Ya-Dong,ZHENG Xing,WANG-Tao and YU He.High responsivity of terahertz detector based on ultra-thin LiTaO3 crystal material[J].Journal of Infrared and Millimeter Waves,2016,35(5):520-525. |
| |
| Authors: | LIANG Zhi-Qing LIU Zi-Ji JIANG Ya-Dong ZHENG Xing WANG-Tao and YU He |
| |
| Affiliation: | State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,No. 4,Section 2,North Jianshe Road,State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,No. 4,Section 2,North Jianshe Road,aState Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,No. 4,Section 2,North Jianshe Road,State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,No. 4,Section 2,North Jianshe Road,State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,No. 4,Section 2,North Jianshe Road and State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,No. 4,Section 2,North Jianshe Road |
| |
| Abstract: | |
| |
| Keywords: | THz detector Lithium tantalate (LiTaO3) wafer chemical grinding and mechanical polishing Voltage responsivity Noise equivalent power |
|
| 点击此处可从《红外与毫米波学报》浏览原始摘要信息 |
|
点击此处可从《红外与毫米波学报》下载全文 |
|
