| 磁过滤阴极真空弧沉积薄膜研究 |
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| 引用本文： | 吴瑜光,张通和,张荟星,张孝吉,王广甫. 磁过滤阴极真空弧沉积薄膜研究[J]. 微细加工技术, 2001, 1(1): 45-49 |
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| 作者姓名： | 吴瑜光 张通和 张荟星 张孝吉 王广甫 |
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| 作者单位： | 1. 北京师范大学
2. 北京师范大学分析测试中心, |
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| 基金项目： | 国家自然科学基金(59671051)和国家863计划资助项目 |
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| 摘 要： | 采用磁过滤阴极真空弧沉积技术对从弧源引起离子束中的大颗粒进行过滤后，在硅和聚合物表面进行离子注入和低能离子束沉积，可获得特性优异的沉积金属膜、超硬膜（类金刚石，CN膜）、陶瓷膜（TiN，TiC）等。电子显微镜观察表明，大颗粒已被过滤，表面结构致密，由于先进行离子注入，在基体表现预先形成了过滤层，从而改善了沉积膜的粘合特性，膜与基体的粘合特性有了明显提高。测量结果表明，沉积膜的硬度、抗磨损和抗腐蚀特性均有了明显提高。非晶金刚石薄膜表面硬度可达到56GPa。
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| 关 键 词： | 磁过滤 离子沉积 类金刚石膜 阴极 真空弧沉积薄膜 |
| 文章编号： | 1003-8213(2001)0l-0045-05 |
| 修稿时间： | 2000-06-12 |
A study on deposited thinfilm using magnetic filter cathode vacuum arc |
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| WU Yu?guang,ZHANG Tong?he,ZHANG Hui?xing,ZHANG Xiao?ji,WANG Guang?fu. A study on deposited thinfilm using magnetic filter cathode vacuum arc[J]. Microfabrication Technology, 2001, 1(1): 45-49 |
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| Authors: | WU Yu?guang ZHANG Tong?he ZHANG Hui?xing ZHANG Xiao?ji WANG Guang?fu |
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| Affiliation: | WU Yu?guang1,ZHANG Tong?he1,ZHANG Hui?xing1,ZHANG Xiao?ji1,WANG Guang?fu2 |
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| Abstract: | The compact thin films on silicon and polymer were implanted by metal Vacuum vapor are (MEVVA) ion implantorl and deposited by magnetic Filter Cathode Vacuum Arc Deposition,The advanced metal,super?hardening(DLC and CN film) and ceramic(Tic,Tin et al)films were obtained. The observations by SEM show that the clusters were filtered using the magnetic filter.The compact film was obtained.The transition layer was formed under the film due to pre?implantation.So that the adhesion of the film to the subtract obviously enhanced.The results show that the mechanical and chemical properties (such as hardness,abrasion resistance and corrosion resistarce)were extremely improved The hardness of diamond?like amorphous carbon(DLC)film is about 56GPa. |
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| Keywords: | Magnetic filter Ion deposition Polymer Diamond?like amorphous carbon(DLC)film |
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