DFB Lasers With Deeply Etched Vertical Grating Based on InAs–InP Quantum-Dash Structures |
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| Authors: | Klaus Mathwig Wolfgang Kaiser Andr Somers Johann Peter Reithmaier Alfred Forchel Kazuya Ohira Saeed M. Ullah Shigehisa Arai |
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| Affiliation: | Technische Phys., Wurzburg Univ.; |
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| Abstract: | Distributed feedback lasers with first-order vertical grating based on AlInGaAs-InAs-InP quantum-dash lasers were fabricated by electron beam lithography and Cl2-Ar reactive ion etching with an electron cyclotron resonance source. Low threshold currents and single-mode operation with sidemode suppression ratios of 48 dB and a direct modulation bandwidth of 5.5 GHz were demonstrated |
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