| MEMS中Ni-W合金薄膜力学性能的研究 |
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| 引用本文： | 刘瑞,汪红,汤俊,毛胜平,陈辉,丁桂甫.MEMS中Ni-W合金薄膜力学性能的研究[J].传感器与微系统,2009,28(8):46-48. |
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| 作者姓名： | 刘瑞 汪红 汤俊 毛胜平 陈辉 丁桂甫 |
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| 作者单位： | 上海交通大学,微纳科学技术研究院,薄膜与微细技术教育部重点实验室微米/纳米加工技术国家级重点实验室,上海,200240 |
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| 基金项目： | 国家"863"计划资助项目 |
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| 摘 要： | 研究了柠檬酸胺-1-羟基乙烷二膦酸（HEDP）镀液体系中Ni-W的力学性能。通过紫外曝光的光刻、电铸和注塑（UV—LIGA）技术制备出微拉伸试样和单轴微拉伸测试系统进行拉伸试验。结果表明：在Ni-W薄膜试样尺寸为5μm×50μm×100μm条件下，其杨氏模量约为100．4GPa，抗拉强度为1．96GPa，应变约为3．6％。
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| 关 键 词： | 微机电系统 Ni—W合金 电沉积 力学性能 拉伸试验 |
Study on mechanical properties of Ni-W alloy films in micro-electro-mechanical system |
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| LIU Rui,WANG Hong,TANG Jun,MAO Sheng-ping,CHEN Hui,DING Gui-fu.Study on mechanical properties of Ni-W alloy films in micro-electro-mechanical system[J].Transducer and Microsystem Technology,2009,28(8):46-48. |
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| Authors: | LIU Rui WANG Hong TANG Jun MAO Sheng-ping CHEN Hui DING Gui-fu |
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| Affiliation: | ( National Key Laboratory of Micro/Nano Fabrication Technology, Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education,Research Institute of Micro/Nano Science and Technology,Shanghai Jiaotong University ,Shanghai 200240, China) |
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| Abstract: | The mechanical properties of Ni-W alloy films electrodeposited in the system of citrate amine-HEDP
are sdudied. The testing chip is fabricated with UV-LIGA technology and measured by uniaxial micro-tensile
system. The gauge section of Ni-W thin film specimen is 5 μm × 50 μm × 100 μm. The results show that the
Young's modulus of Ni-W film is about 100.4 GPa, tensile strength is about 1.96GPa and strain is about 3.6% ,
respectively. |
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| Keywords: | MEMS Ni-W alloy electro deposition mechanical properties tensile test |
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