| 低镜面反射硅镀膜玻璃的微结构调制 |
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| 引用本文： | 张溪文,莫建良,瞿浩明,韩高荣. 低镜面反射硅镀膜玻璃的微结构调制[J]. 材料科学与工程学报, 2000, 18(4): 20-22 |
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| 作者姓名： | 张溪文 莫建良 瞿浩明 韩高荣 |
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| 作者单位： | 硅材料国家重点实验室，浙江大学，浙江 杭州310027 |
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| 基金项目： | 国家自然科学基金!资助(5 9872 0 2 9) |
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| 摘 要： | 通过反射率、透射率参量测试和高分辨电镜分析 ,研究了硅薄膜中微晶粒数量、尺寸和分布对镀膜玻璃镜面反射效果的影响。发现通过一定的热处理工艺可以调整硅膜中的晶粒状况 ,得到硅微晶粒数量众多、分布弥散且晶粒大小在数十至数百纳米的硅 /非晶硅复合薄膜 ,使入射光产生漫散射进而有效降低镜面反射所造成的光污染。
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| 关 键 词： | 镀膜玻璃 漫散射 硅微晶 |
| 文章编号： | 1004-793x(2000)04-0020-03 |
| 修稿时间： | 2000-08-15 |
Microstructure Modulation of Silicon Planted Glass with Low Mirror Reflection |
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| ZHANG Xi-wen,MUO Jian-liang,QU Hao-ming,HAN Gao-rong. Microstructure Modulation of Silicon Planted Glass with Low Mirror Reflection[J]. Journal of Materials Science and Engineering, 2000, 18(4): 20-22 |
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| Authors: | ZHANG Xi-wen MUO Jian-liang QU Hao-ming HAN Gao-rong |
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| Abstract: | Effects of the quantity, size and distribution of micro crystalline grains in silicon films on the mirror reflection of silocon|coating glass were investigated, through the reflectivity, transmissivity measurements and high resolution microscopy(HREM) analysis. The crystalline grain can be modulated in the heat treatment processing, and a c|Si|a|Si film distributed with large amount of silicon crystalline grains is obtained. The dimension of silicon crystalline grains is between tens to hundreds of nanometer, leading to the increase of scattered reflection for visible incident lights and effective reduction of mirror reflection induced light|pollution. |
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| Keywords: | silicon|coating glass scattered reflection silicon micro|crystalline grain. |
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