| 微波腔体微扰法在测厚技术中的应用 |
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| 引用本文： | 花健敏 肖芬. 微波腔体微扰法在测厚技术中的应用[J]. 微波学报, 1993, 9(3): 49-52 |
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| 作者姓名： | 花健敏 肖芬 |
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| 作者单位： | 厦门大学，厦门大学，厦门大学 |
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| 摘 要： | 本文介绍一种微波腔体微扰法测量介质薄膜厚度的仪器。它的主要特点是:用圆柱TE_(011)模谐振腔作为介质膜厚度测量的传感器,将非电量厚度的参量转换为谐振的频偏值,用电调谐的场效应压控振荡器(FET-VCO)作为微波源。它们与指示电路组合构成测厚装置显示介质膜厚度。其结构简单,测量快速方便,可实现非接触测量,不受静电干扰,对ε'_r=2.0～3.0的塑料薄膜、分辨率优于032μm。
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| 关 键 词： | 测量 厚度 微波腔体 微扰法 |
Application of the Method of Microwave Cavity Perturbation in Measuring Thickness Techniques |
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| Hua Jian-min Xiao Fen Zhong Mao sheng. Application of the Method of Microwave Cavity Perturbation in Measuring Thickness Techniques[J]. Journal of Microwaves, 1993, 9(3): 49-52 |
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| Authors: | Hua Jian-min Xiao Fen Zhong Mao sheng |
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| Affiliation: | Xiamen University |
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| Abstract: | This article presents a thickness measuring meter for the dielectric films based on cavity perturbation. A high Q TE_(011) cylinderical cavity is used as the sensor, it transforms the thickness parameter into frequency-shift data. A FET voltage-control oscillator is used as the source.in conncction with a detective circuit to indicate the thickness of dielectric films. The device has some good features such as, simple structure, convenient for use,contactless measurement and without electrostatic interference. |
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| Keywords: | Cavity perturbation Dielectric film Measuring thickness |
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