| 用原子力显微镜扫描测量金刚石刀具刃口半径 |
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| 引用本文： | 孙涛,谭久彬,董申.用原子力显微镜扫描测量金刚石刀具刃口半径[J].工具技术,1999,33(1):30-32. |
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| 作者姓名： | 孙涛 谭久彬 董申 |
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| 作者单位： | 哈尔滨工业大学,150001 |
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| 基金项目： | “九五”国防重点预研项目“纳米加工与检测”资助项目 |
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| 摘 要： | 介绍了应用原子力显微镜（ＡＦＭ）扫描测量超精密加工用金刚石刀具刃口半径的方法，给出了测量图象和测量结果。该方法可提高金刚石刀具刃口半径的测量精度，对进一步分析刃口参数对超精密加工表面质量的影响具有一定指导意义。
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| 关 键 词： | 金刚石刀具 刃口半径测量 原子力显微镜 |
Scanning Measurement of Cutting Edge Radius of Diamond Tools by Atomic Force Microscope |
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| Sun Tao,et al.Scanning Measurement of Cutting Edge Radius of Diamond Tools by Atomic Force Microscope[J].Tool Engineering(The Magazine for Cutting & Measuring Engineering),1999,33(1):30-32. |
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| Authors: | Sun Tao et al |
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| Affiliation: | Sun Tao et al |
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| Abstract: | On the basis of scanning probe theory, a new method for measuring the cutting edge radius of diamond tools used in ultra-precision machining is proposed. By this method, the measaing accuracy is improved. The measuring images and the analyzing results of measuring errors are given. The method also has a directive significance to the analysis of the influence of cutting edge radius on surface quality. |
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| Keywords: | diamond tool measurement of cutting edge radius atomic force microscope(AFM) |
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