一种基于自动对焦的非球面测量系统

影响高精度非球面磨削加工精度的不仅是机床、刀具和数控技术等参数,而且取决于制造系统所采用的测试手段和所能达到的测量精度.针对非球面制造系统的测量特点,将光栅测量技术和光学显微镜自动对焦技术引入环节,进而提高对非球面工件的测量精度,解决了制约非球面加工精度提高的测量问题.

An Aspheric Surface Measurement System Based on Automatic Focusing

The manufacturing accuracy in grinding optical aspheric surface is not only affected by the factors such as machine,tool and the numerical control technology,but also affected by the measurement applied by the aspheric surface grinding system and the precision of measurement. In order to improve the precision of measurement,which have effects on the aspheric surface manufacturing accuracy,grating measurement technology and auto-focus technology of optical microscope are applied in this system according to characteristic of the measurement, thus the measuring problem conditioning the manufacturing accuracy will be overcome.