| 微量气体定量分析中真空度自动控制技术 |
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| 引用本文： | 陈光锋. 微量气体定量分析中真空度自动控制技术[J]. 真空与低温, 2001, 7(4): 241-245 |
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| 作者姓名： | 陈光锋 |
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| 作者单位： | 兰州物理研究所,甘肃,兰州,730000 |
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| 摘 要： | 为了实现质谱微量气体信号检测及其它自动测控系统中的真空度快速进入稳态,提出了脉冲进气宽度可调真空度自动控制系统.给出了系统的结构,根据建立的数学模型推出了真空系统参数的辨识公式和系统控制律.通过计算机进行了仿真实验,证明该种方法有效可行.
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| 关 键 词： | 真空度 控制 脉冲进气 |
| 文章编号： | 1006-7086(2001)04-0241-05 |
| 修稿时间： | 2001-03-24 |
VACUUM PRESSURE AUTOMATIC CONTROL TECHNIQUE FOR TINY GAS QUANTITATIVE ANALYSIS |
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| CHEN Guang_feng. VACUUM PRESSURE AUTOMATIC CONTROL TECHNIQUE FOR TINY GAS QUANTITATIVE ANALYSIS[J]. Vacuum and Cryogenics, 2001, 7(4): 241-245 |
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| Authors: | CHEN Guang_feng |
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| Abstract: | In order to make the vacuum pressure stable rapidly during gas quantitative analysis using mass spectrum or the other automatic measuring and controlling system ,an automatic control system with width of gas pulse inlet regulated has been presented. The structure of the system ,the mathemacal model ,the method of identifying parameters of the vacuum system and the control theory have been conducted.The method has been proven to be efficient by computer simulation experiments. |
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| Keywords: | vacuum pressure control gas pulse inlet |
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