La掺杂ZnO和SnO2薄膜的气敏特性

真空蒸发沉积薄膜再经热氧化获得n型掺La的ZnO和SnO2薄膜(玻璃衬底)研究掺La含量与热氧化工艺对薄膜的物相结构、表面形貌和气敏特性的影响.实验给出:掺La使薄膜表面颗粒细化,随La含量增加,ZnO,SnO2薄膜平均晶粒尺寸均增大.掺La可明显降低2种薄膜的气敏工作温度相比之下,掺La对ZnO薄膜的灵敏度改善明显优...

Gas sensing properties of ZnO and SnO2 films by La-doped

La-doped n-type ZnO and SnO2 thin films are prepared by method of vacuum evaporation on glass substrates.The effects of doping content and heat-oxidation on the structure,surface topography and sensitive characteristics are investigated.The results show that surface is refined after La-doping.With the increasing doping amount,the average grain size of ZnO and SnO2 thin films increased as well.In addition,the operating temperature for gas sensing is reduced significantly by the way of La-doping.In contrast with SnO2 doping,the La-doped ZnO films show better gas sensing property.When environed in reducing gas environment(acetone,ethanol)with volume fraction of 6×10-3,the sensitivities to acetone and ethanol of 3% La-doped ZnO thin films are 36 and 23;the sensitivity to acetone of 3% La-doped SnO2 thin films is 15.The 5% La-doped SnO2 films show the improvement of the sensing property to ethanol.