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| 基于MEMS工艺的硅基四电极电导率与温度集成传感器芯片的研制 | |
| 引用本文： | 张高燕,吴少华,赵湛.基于MEMS工艺的硅基四电极电导率与温度集成传感器芯片的研制[J].传感技术学报,2011,24(7):966-969. |
| 作者姓名： | 张高燕 吴少华 赵湛 |
| 作者单位： | 1. 浙江大学城市学院,杭州,310015 2. 中国科学院电子学研究所传感技术国家重点实验室,北京100190;中国科学院研究生院,北京100190 3. 中国科学院电子学研究所传感技术国家重点实验室,北京,100190 |
| 摘 要： | 水参数的集成测量是水资源保护和海洋科学的基础,具有重要的意义.基于MEMS技术设计了流程简单、易于制备的铂电阻式温度传感器与圆环形四电极式电导率传感器集成芯片,采用专用的温度检定箱和双运放结构的测量电路分别对集成芯片的温度部分和电导率部分进行测试,得到了较好的测量结果.良好的线性曲线有利于后续的标定与应用.这款集成芯片... |
| 关 键 词： | 硅基集成传感器芯片 水参数监测 MEMS 四电极式电导率测量 |
Research of Four-electrode Conductivity and Temperature Integrated Sensor Chip Based On Silicon Wafer by MEMS Technology |
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| ZHANG Gaoyan,WU Shaohua,ZHAO Zhan.Research of Four-electrode Conductivity and Temperature Integrated Sensor Chip Based On Silicon Wafer by MEMS Technology[J].Journal of Transduction Technology,2011,24(7):966-969. | |
| Authors: | ZHANG Gaoyan WU Shaohua ZHAO Zhan |
| Affiliation: | ZHANG Gaoyan1,WU Shaohua2,3,ZHAO Zhan21.Zhejiang University City College,Hangzhou 310015,China,2.State Key Laboratory of Transducer Technology,Institute of Electronics,Chinese Academy of Science,Beijing 100190,3.Graduate University of Chinese Academy of Sciences,Chin |
| Abstract: | Integrated measurement of water parameters is the basis of water resource protection and ocean science.The sensor chip with a platinum resistance temperature unit and a ring-form four-electrode conductivity unit which has the advantage of simple process and easy preparation is introduced.The temperature testing box and dual operation amplifiers circuit are used to test separately the temperature part and the conductivity part,good measurement results are obtained so that the following calibration and applic... |
| Keywords: | integrated sensor chip on silicon water parameter monitoring MEMS four-electrode conductivity measurement |
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