| 基于ANSYS的声表面波氢气传感器压电分析 |
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| 引用本文： | 董宁宁,殷晨波,张子立,朱斌.基于ANSYS的声表面波氢气传感器压电分析[J].传感技术学报,2011,24(7):950-953. |
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| 作者姓名： | 董宁宁 殷晨波 张子立 朱斌 |
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| 作者单位： | 南京工业大学机械与动力工程学院,南京,210009 |
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| 基金项目： | 国家自然科学基金项目，江苏省自然科学基金，江苏省高校自然科学基金项目 |
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| 摘 要： | 设计了声表面波氢气传感器的结构,利用ANSYS软件建立了声表面波传感器的有限元模型,并对SAW氢气传感器进行了仿真,最后用数据处理软件Origin分析了敏感薄膜的材料参数对传感器输出的影响.传感器通人1 000× 10-6的氢气后,钯膜的厚度、密度、弹性模量等发生了相应改变,进而导致输出电压、频率等发生改变.分析表明:...
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| 关 键 词： | 声表面波 氢气传感器 ANSYS 压电分析 |
The piezoelectric analysis of SAW hydrogen sensor |
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| DONG Ningning,YIN Chenbo,ZHANG Zili,ZHU Bin.The piezoelectric analysis of SAW hydrogen sensor[J].Journal of Transduction Technology,2011,24(7):950-953. |
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| Authors: | DONG Ningning YIN Chenbo ZHANG Zili ZHU Bin |
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| Affiliation: | DONG Ningning,YIN Chenbo,ZHANG Zili,ZHU Bin(School of Mechanical and Power Engin,Nanjing University of Technology,Nanjing 210009,China) |
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| Abstract: | The structure of the surface acoustic wave (SAW) sensor was designed. The finite element model of SAW hydrogen sensor was developed and simulated using ANSYS platform. As the sensor was exposed to 1000ppm hydrogen, the thickness, the density and the elastic modulus of the Pd film have changed correspondingly, which lead to the change of output voltage and frequency. When the thickness of Pd film increased, transmission of SAW in the piezoelectric substrate slowed down, the frequency became smaller and the amplitude of the output voltage increased; when the density decreased, the amplitude of the output voltage became smaller; when the elastic decreased, the amplitude of output voltage increased and have a slight delay. |
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| Keywords: | surface acoustic wave(SAW) Hydrogen sensor ANSYS piezoelectric analysis |
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