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基于声表面波技术实现纸基微流开关研究
引用本文:章安良,尉一卿,韩庆江,叶丽军. 基于声表面波技术实现纸基微流开关研究[J]. 传感技术学报, 2011, 24(6): 788-792. DOI: 10.3969/j.issn.1004-1699.2011.06.002
作者姓名:章安良  尉一卿  韩庆江  叶丽军
作者单位:宁波大学信息学院,浙江宁波,315211
基金项目:浙江省自然科学基金项目(Y1080118);宁波市自然基金项目
摘    要:提出了采用声表面波技术实现纸基微流开关的方法。它由127.68°旋转Y切割X传播方向的LiNbO3压电基片和两个有一定间隙的纸微通道组成。压电基片上采用微电子工艺制作1个中心频率为27.5MHz的叉指换能器和1个反射栅,纸微流通道采用PDMS薄膜贴附于压电基片的声传播路径上,微流通道一侧微流体在没有声表面波作用时,微流...

关 键 词:微流开关  声表面波  叉指换能器  微通道

Study on Paper Based Micro-fluidic switch Based on Surface Acoustic Wave
ZHANG An'liang,WEI Yiqing,HAN Qingjiang,YE Lijun. Study on Paper Based Micro-fluidic switch Based on Surface Acoustic Wave[J]. Journal of Transduction Technology, 2011, 24(6): 788-792. DOI: 10.3969/j.issn.1004-1699.2011.06.002
Authors:ZHANG An'liang  WEI Yiqing  HAN Qingjiang  YE Lijun
Affiliation:(Faculty of Information Science and Information Engineering,Ningbo University,Ningbo Zhejiang 315211,China)
Abstract:A paper-based micro-fluidic switch has been implemented using surface acoustic wave.It is comprised of a 127.68° yx-LiNbO3 substrate and two paper micro-channels within small spaces.An interdigital transducer with 27.5MHz center frequency and a reflector were fabricated on the piezoelectric substrate,and the paper micro-channels were stuck on the piezoelectric substrate by PDMS film.Micro-fluids could not pass through the small spaces of the two paper micro-channels without SAW,which is "off" of the switch.However,the micro-fluids could pass through the small spaces by the helping of SAW excited by the interdigital transducer,when an amplified RF signal is added on the interdigital transducer.The switch is in"on"state.Experiment results of red dye solutions and NaNO2 solutions show that paper micro-fluidic switch can be implemented by the helping of SAW.
Keywords:micro-fluidic switch  surface acoustic wave  interdigital transducer  micro-channel.
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