| 静电驱动MEMS谐振式压力传感器闭环拓扑研究 |
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| 引用本文： | 王玉朝,苑伟政,任森,乔大勇. 静电驱动MEMS谐振式压力传感器闭环拓扑研究[J]. 传感技术学报, 2011, 24(7): 970-975. DOI: 10.3969/j.issn.1004-1699.2011.07.008 |
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| 作者姓名： | 王玉朝 苑伟政 任森 乔大勇 |
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| 作者单位： | 西北工业大学微/纳米系统陕西省重点实验室,西安,710072 |
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| 摘 要： | 谐振式压力传感器闭环拓扑结构对保持机械谐振器振荡的稳定性和可靠性起着重要作用.针对一种典型结构的静电驱动电容检测MEMS谐振式压力传感器,在分析工作原理的基础上,构建了其混合信号模型.基于该模型搭建了自激振荡、自动增益控制、锁相环和带AGC的自激振荡四种闭环拓扑结构.在混合信号仿真平台下,对四种拓扑结构在起振状况、自动...
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| 关 键 词： | MEMS 谐振式压力传感器 闭环拓扑 频率跟踪 PLL |
Closed-Loop Topologies for Electrostatic Drive Resonant Pressure Sensor |
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| WANG Yuzhao,YUAN Weizheng,REN Sen,QIAO Dayong. Closed-Loop Topologies for Electrostatic Drive Resonant Pressure Sensor[J]. Journal of Transduction Technology, 2011, 24(7): 970-975. DOI: 10.3969/j.issn.1004-1699.2011.07.008 |
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| Authors: | WANG Yuzhao YUAN Weizheng REN Sen QIAO Dayong |
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| Affiliation: | WANG Yuzhao,YUAN Weizheng,REN Sen,QIAO Dayong(Micro and Nano Electromechanical System Laboratory,Northwestern Polytechnical University,Xi'an 710072,China) |
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| Abstract: | Closed-loop topology plays an important role in sustaining reliable oscillation for resonant pressure sensor.A hybrid model of a typical MEMS resonant pressure sensor,which is driven by electrostatic force and sensed by capacitance changes,was constructed to research the influence of closed loop topology.Four closed-loop topologies including self-oscillation,automatic gain controller,Phase-Locked Loop and self-oscillation with automatic gain controller,were employed in the hybrid model.Using a mixed signal ... |
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| Keywords: | MEMS resonant pressure sensor closed-loop topology frequency tracking PLL |
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