| 基于PVDF薄膜的流场动态压力检测方法的研究 |
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| 引用本文： | 阮晓东,巴静,陈晖,陈文昱,傅新. 基于PVDF薄膜的流场动态压力检测方法的研究[J]. 传感器与微系统, 2011, 30(7): 51-53,56 |
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| 作者姓名： | 阮晓东 巴静 陈晖 陈文昱 傅新 |
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| 作者单位： | 浙江大学流体传动及控制国家重点实验室,浙江杭州,310027 |
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| 基金项目： | 中央高校基本科研业务费专项资金资助项目，国家科技部国际合作项目，浙江省自然科学基金资助项目 |
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| 摘 要： | 针对检测狭小空间流场压力时,通用液体压力传感器存在体积大、频响低以及干扰流场等问题,提出一种基于聚偏氟乙烯(PVDF)薄膜的流场动态压力检测方法,该方法采用光刻工艺直接在敷镀有金属铝电极的PVDF薄膜上制作压力传感元件,该元件具有面积小、厚度薄、柔韧性好的特点,非常适合于狭小流场空间壁面压力分布的测量.试验研究表明:该...
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| 关 键 词： | 狭小流场 聚偏氟乙烯薄膜 动态压力 光刻工艺 |
Study on dynamic pressure detection method for flow field based on PVDF film |
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| RUAN Xiao-dong,BA Jing,CHEN Hui,CHEN Wen-yu,FU Xin. Study on dynamic pressure detection method for flow field based on PVDF film[J]. Transducer and Microsystem Technology, 2011, 30(7): 51-53,56 |
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| Authors: | RUAN Xiao-dong BA Jing CHEN Hui CHEN Wen-yu FU Xin |
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| Affiliation: | (State Key Laboratory of Fluid Power Transmission and Control,Zhejiang University,Hangzhou 310027,China) |
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| Abstract: | Aiming at the problems of large size,low frequency response and arousing disturbance to the flow field that most present liquid pressure sensors have when detecting flow field pressure of narrow space,a PVDF film-based flow field dynamic pressure detection method is proposed.Directly fabricated from an aluminum-coated PVDF film using lithographic process,the sensing element implemented in this method has been endowed with the advantages of small size,thin thickness and good flexibility,which make it applicable for the wall pressure distribution measurement for narrow gap flow field.Experimental research shows that this method is well suitable for the slight pressure fluctuation detection in the flow field,with a linearity error of ±2.3% and a sensitivity of 1.32mV/Pa. |
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| Keywords: | narrow flow field PVDF film dynamic pressure lithographic process |
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