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In-proces sensors for surface roughness and their applications |
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| Authors: | K. Mitsui |
| Affiliation: | * Mechanical Engineering Laboratory of the Ministry of International Trade and Industry, Namiki 1-2, Sakura-mura, Niiharigun, Ibaraki-ken, 305, Japan |
| Abstract: | Potential non-contact optical methods for in-process surface roughness measurement are described, including reflected light position detection, focu |
| Keywords: | surface roughness optical techniques in-process metrology |
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