| 一种非接触高精度平面高度差检测方法 |
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| 引用本文： | 刘力双,吕乃光,孙双花,王宝光.一种非接触高精度平面高度差检测方法[J].传感技术学报,2007,20(7):1644-1647. |
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| 作者姓名： | 刘力双 吕乃光 孙双花 王宝光 |
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| 作者单位： | 北京机械工业学院电子信息工程系,北京,100085;天津大学精密测试技术与仪器国家重点实验室,天津,300072 |
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| 摘 要： | 精密光学系统的安装精度要求非常高,必须经过严格检测.提出了一种基于电容传感器的非接触平面高度差检测方法.以精密电容传感器为核心,利用多传感器的相对测量,减小了漂移的影响,实现了高精度测量;通过使用标准厚度块,增大了测量的量程和使用范围.文中对测量的原理和精度进行了分析,经鉴定,该方法测量精度达到2 μm.
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| 关 键 词： | 电容传感器 高度差 非接触 高精度 |
| 文章编号： | 1004-1699（2007）07-1644-04 |
| 收稿时间： | 2006-09-20 |
| 修稿时间： | 2006-09-202006-12-27 |
A Non-contact High Accuracy Measurement Method for Height Difference of Surfaces |
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| LIU Li-shuang,Lv Nai-guang,Sun Shuang-hu,WANG Bao-guang.A Non-contact High Accuracy Measurement Method for Height Difference of Surfaces[J].Journal of Transduction Technology,2007,20(7):1644-1647. |
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| Authors: | LIU Li-shuang Lv Nai-guang Sun Shuang-hu WANG Bao-guang |
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| Affiliation: | 1.Department of Electronic Information Engineering, Beijing Institute of Machinery, Beijing 100085, China;2.State Key Laboratory of Precision Measurement Technology and Instruments, Tianjin University, Tianjin 300072, China |
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| Abstract: | Optical precision system requires a severe test to ensure high installation accuracy. We propose a capacitor sensor based measurement method for height difference of surfaces. In order to reduce the influence of drift and improve the accuracy of measurement, we employ high precision capacitor sensor as a core component and perform relative measurement with multi-sensors. The use of standard measurement block expands the measurement range and usage of the method. Measurement principle and accuracy are analyzed and it is proved that the measurement accuracy reaches 2 . |
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| Keywords: | capacitor sensor height difference of surfaces non-contact high accuracy |
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