5th Research Group, National Research Institute for Metals, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan
Abstract:
The method by which micrometer-sized particles are arranged, is described. An electrified pattern is drawn on a polished insulating substrate using a SEM with a CAD facility. The substrate is dipped in a suspension of particles. The particles adhere to the substrate and form the pattern corresponding to the electrified pattern by the electrostatic force. The arranged particles are fixed by coating with a fluoride polymer of thin film. The method is applicable to the production of an inflammable gas sensor.