微/纳传动平台的位移耦合分析

根据机械设计、机械原理、有限元法及线性分析理论,建立微/纳传动平台的有限元模型,推导该平台的位移耦合计算公式,得到该平台沿各方向运动的解耦方程.结合耦合分析图,分析微/纳传动平台多尺度的位移耦合影响,获得该平台沿X、Y、Z轴移动以及绕X、Y轴转动的位移耦合规律,其中沿Z向运动引起的位移耦合最小,定位精度最高；沿X、Y向运动引起的位移耦合最大,对位移耦合影响较大的运动分支进行位移补偿.通过搭建的实验平台进行测试,将实验结果与有限元仿真和理论计算结果进行对比分析,结果基本一致,验证了该平台位移耦合分析方法的正确性.

Displacement coupling analysis of micro/nano transmission platform

The finite element model of micro/nano transmission platform was established according to mechanical design, mechanical principles, finite element method and linear analysis theories. The calculation formulas for displacement coupling of the platform were derived, and the decoupling equations along each moving directions were acquired. The multi-scale displacement coupling effect of micro/nano transmission platform was analyzed combined with coupling analysis diagrams. Then the displacement coupling regulations of moving along X, Y, Z axes and rotating around X, Y axes were acquired respectively. The caused coupling displacement along Z axis is minimum and the platform has the highest position accuracy. The responsive coupling displacements along X and Y axis are maximum. The displacement compensation was performed on the movement directions which have great coupling displacement. The experimental results accorded well with the finite element simulation and theoretical results through constructing experimental platform and testing, which verified the validity of the method.